Gate dielectric integrity - material, process, and tool qualification
- Författare
- Conference on Gate Dielectric Integrity (1999 : San Jose) George A. Brown Dinesh C. Gupta
- (Dinesh C. Gupta and George A. Brown, editors., Förord: "The Conference on Gate Dielectric Integrity was held on January 25, 1999 in San Jose, California. ASTM Committee F-1 on Electronics sponsored the conference")
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| ASTM | 2000 | USA, West Conshocken, Pa | 169 sidor. |